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EL-FLOW Prestige series  

첨부파일 El-Flow Prestige.pdf



EL-FLOW® Prestige, the latest generation thermal mass flow meters and controllers for gases, represents a truly ground-breaking shift in versatility and user-friendliness. Its principal customer benefits are based upon

  • Further advances in flow-signal processing
  • Highly stable flow control regime virtually impervious to process fluctuations
  • Advanced control valve design
  • An on-board gas conversion model
  • Significantly reduced power consumption
  • A user configurable device with a multitude of additional features and benefits
Lowest range 0,014...0,7 mln/min
up to highest range 0,4...20 ln/min

The Mass Flow Meter/Controller that adapts to your process

The control performance of EL-FLOW Prestige Mass Flow Controllers is factory adjusted to swiftly respond to setpoint changes, without overshoot. Moreover, the controllers are highly resistant to mechanical shocks and pressure fluctuations, which may be caused by other devices consuming gas from the same source. As an option the MFCs can be tuned for extra fast response (settling times t98% down to 500 msec) or extra smooth control, depending on the requirements of the user’s process. The dynamic behavior can also be tuned on site easily, by adjusting the controller speed settings via FlowTune™, or by using our software tool FlowPlot™. This free tool can also be used for device diagnostics or alarm and counter settings.

Select the I/O options of your preference

Numerous input/output options can be offered through the programmable sub-D 9-pin connector. In addition to the various analog signal options and the standard RS232 communication, there are such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output. Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNet™, PROFIBUS DP, PROFINET, Modbus RTU/ASCII, EtherCAT® and FLOW-BUS. The latter is an RS485 based fieldbus, specifically designed by Bronkhorst High-Tech for their mass flow metering and control solutions. For the convenience of customers working with LabVIEW™ (graphical software by National Instruments) Bronkhorst provides a certified plug & play instrument driver for instruments with FLOW-BUS™ interface.

Reduce your cost of ownership

EL-FLOW Prestige offers high flexibility due to the Multi Gas / Multi Range (MG/MR) functionality. This functionality, now extended to 25 gases, is easily accessible via the FlowTune™ software or PLC; there is no need to disconnect the instrument from your system. For additional gas types the user can calculate accurate fluid properties for conversion by means of our free, online software tool Fluidat® on the Net. Users of EL-FLOW Prestige instruments can rescale their instruments on site, saving time and money for dismounting and recalibration. Furthermore, original equipment manufacturers (OEMs) are able to drastically reduce the variety of spare instruments kept on stock and thus reduce the cost of ownership.

Customized Input/Output configurations

Besides the obvious I/O-options for measured and setpoint values via analog signals, RS232 or fieldbus communication, EL-FLOW Prestige features a programmable pin (pin 5) at the 9-pin sub-D connector for customized I/O configurations. This functionality can be used for advanced operations such as digital frequency/pulse output, alarm output/reset, processing an external setpoint signal, valve purge/close and analog valve output. Some options are specified in the model number identification, however, numerous other settings can be programmed on request.


  • High accuracy (standard 0,5% Rd plus 0,1% FS)
  • Rangeability in digital mode up to 1:150
  • Extremely fast and dynamic response
  • Multi-Gas / Multi-Range functionality (25 selectable gases; scalable between 40%-120% or ordered capacity (FS value)
  • Pressure ratings 64 / 100 bar
  • Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
  • Great variety of customized I/O options
  • User configurable control characteristics
  • Robust metal housing


  • Analytical/environmental equipment
  • Gas flow monitoring in food, chemical and petrochemical industries
  • Gas consumption measurement in gas distribution systems for internal accounting purposes
  • Detection of gas leakage through objects
  • Semiconductor manufacturing
  • Surface treatment installations
and many more!

Flow capacities (based on air)

Mass Flow Meter (MFM);
PN100 (Pressure rating 100 bar)


Series FG-110C min. 0,014 ... 0,7 mln/min
max. 0,18 ... 9 mln/min
Series FG-111B min. 0,14 ... 7 mln/min
max. 0,4 ... 20 ln/min

Mass Flow Controller (MFC);
PN64 / PN100


Series FG-200CV min. 0,014 ... 0,7 mln/min
max. 0,18 ... 9 mln/min
Series FG-201CV min. 0,014 ... 0,7 mln/min
max. 0,18 ... 9 ln/min
Series FG-201CV min. 0,14 ... 7 ln/min
max. 0,4 ... 20 ln/min
Series FG-211CV min. 0,14 ... 7 ln/min
max. 0,4 ... 20 ln/min

Mass Flow Controller (MFC);
with integrated shut-off valve
PN10 (Pressure rating 10 bar)


Series FG-201CS min. 0,014 ... 0,7 mln/min
max. 0,4 ... 20 mln/min


EL-FLOW® Prestige series Mass Flow Meters / Controllers for Gases

EL-FLOW Prestige FG-110C Mass Flow Meter
EL-FLOW Prestige FG-110C
Mass Flow Meter

EL-FLOW Prestige FG-201CV Mass Flow Controller
EL-FLOW Prestige FG-201CV
Mass Flow Controller

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